Ayela C., Lalo H., Kuhn A.,
Appl. Phys.Lett. 2013, 102, 053501.

The purpose of the present work is the introduction of a combined bottom-up and top-down approach to generate 3-dimensional gold microcantilevers, where the porosity in the volume of the free-standing microstructure is well-controlled. By combining the elaboration of a colloidal crystal, followed by electrodeposition, with a sacrificial layer process, free-standing macroporous gold cantilevers are fabricated collectively. In order to validate the proposed concept, a simple application to humidity sensing is evaluated using the devices as mass sensors. A large sensitivity of −529 ppm/%RH and low discrepancy are obtained experimentally, confirming the promising application potential of this original architecture.


ApplPhysLett2013 p053502 TOC